By Topic

Thin-Film Bulk-Acoustic-Resonator Gas Sensor Functionalized With a Nanocomposite Langmuir–Blodgett Layer of Carbon Nanotubes

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

9 Author(s)
Michele Penza ; Italian Nat. Agency for New Technol., Brindisi ; Patrizia Aversa ; Gennaro Cassano ; Domenico Suriano
more authors

A thin-film bulk acoustic resonator (TFBAR) based on a vibrating membrane of AlN/Si3N4 has been fabricated onto a silicon substrate and functionally characterized as gas sensor at a resonating frequency of 1.045 GHz. This novel TFBAR-based gas sensor has been functionalized by a sensing nanocomposite layer, prepared by a Langmuir-Blodgett (LB) technique, of single-walled carbon nanotubes (SWCNTs) embedded in a host matrix of organic material of cadmium arachidate. High-performance gas detection at room temperature of a SWCNT-coated TFBAR sensor has been reported. The sensing device exhibits high sensitivity (e.g., acetone: 12 kHz/ppm; ethylacetate: 17.3 kHz/ppm), fast response (within 2-3 min), slow reversibility (within 1 h), and good repeatability (les 5% variation) of response toward tested organic vapors of acetone, ethylacetate, and toluene.

Published in:

IEEE Transactions on Electron Devices  (Volume:55 ,  Issue: 5 )