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Implementation of x-ray energy detection and photon counting using a silicon field-emission imaging array

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3 Author(s)
Wong, M.C. ; Univ. of California, Davis ; Hunt, Charles E. ; Diawara, Y.

A silicon field-emission array (FEA) was proposed for the implementation of x-ray energy detection and photon counting. The response of single X-ray photon events of differing X-ray energies is modeled showing two pulses with different widths and amplitudes. To verify the theory, a 2cm x 2cm silicon field emission array has been fabricated by subtractive etching and oxidation sharpening techniques. At 450 mum cathode to anode distance and at a vacuum level of 5x107 Torr, the device was biased at 1400V, field emitting at an integrated current of 32pA. When the device was excited by a 100muCi Fe55 X-ray source, an average increase of 24pA was observed.

Published in:

Vacuum Nanoelectronics Conference, 2007. IVNC. IEEE 20th International

Date of Conference:

8-12 July 2007