Skip to Main Content
In this study, we investigated the effect of bias-aging on electron emission from well-aligned CNT-emitter arrays. As a result, we obtained enhanced electron emission characteristics by bias-aging. In order to make the field emission array (FEA), growth of CNTs was carried out with a triode DC-PECVD with a mesh grid palced above the substrate holder electrode. The growth process by using the resist-assisted patterning is very simple and low cost to fabricate emitter arrays.