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Development of method to model surface of reflowed square microlens for image sensor

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5 Author(s)
S. M. Kim ; Yonsei Univ., Seoul ; M. Choi ; H. Kim ; J. Lim
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A numerical method to model the surface of a reflowed square micro- lens is proposed to improve the simulation accuracy of photosensitivity for an image sensor. To verify the proposed method, a reflowed square microlens with base size of 4.8 x 4.8 mum and sag height of 1.55 mum was fabricated and the modelling accuracy was compared and analysed.

Published in:

Electronics Letters  (Volume:44 ,  Issue: 7 )