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Characterizing Fluorine-Ion Implant Effects on Poly-Si Thin-Film Transistors With {\hbox {Pr}}_{2}{\hbox {O}}_{3} Gate Dielectric

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6 Author(s)
Chia-Wen Chang ; Inst. of Electron., Nat. Chiao-Tung Univ., Hsinchu ; Chih-Kang Deng ; Shih-Chieh Wu ; Jiun-Jia Huang
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The fluorine ion implantation applied to the polycrystalline silicon thin-film transistors (poly-Si TFTs) with high-k Pr2O3 as gate dielectric is investigated for the first time. Using the Pr2O3 gate dielectric can obtain a high gate capacitance density and thin equivalent-oxide thickness, exhibiting a greatly enhancement in the driving capability of TFT device. Introducing fluorine ions into the poly-Si film by fluorine ion implantation technique can effectively passivate the trap states in the poly-Si film and at the Pr2O3/poly-Si interface to improve the device electrical properties. The Pr2O3 TFTs fabricated on fluorine-implanted poly-Si film exhibit significantly improved electrical performances, including lower threshold voltage, steeper subthreshold swing, higher field-effect mobility, lower off-state leakage current, and higher on/off current ratio, as compared with the control poly-Si Pr2O3 TFTs. Also, the incorporation of fluorine ions also improves the reliability of poly-Si Pr2O3 TFTs against hot-carrier stressing, which is attributed to the formation of stronger Si-F bonds. Furthermore, superior threshold-voltage rolloff characteristic is also demonstrated in the fluorine-implanted poly-Si Pr2O3 TFTs. Therefore, the proposed scheme is a promising technology for high-performance and high-reliability solid-phase crystallized poly-Si TFT.

Published in:

Journal of Display Technology  (Volume:4 ,  Issue: 2 )