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Design and analysis of dual axis MEMS accelerometer

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3 Author(s)
Chattaraj, D. ; Indian Inst. of Technol. Kharagpur, Kharagpur ; Swamy, K.B.M. ; Sen, S.

A dual axis MEMS capacitive Accelerometer with a single proof mass structure has been designed for the range of plusmn30 g. Instead of using two single axis accelerometer separately; an unique structure combining the features of two single axis accelerometer has been designed for measuring the acceleration in 'x' and 'y' axes simultaneously.

Published in:

Physics of Semiconductor Devices, 2007. IWPSD 2007. International Workshop on

Date of Conference:

16-20 Dec. 2007