Referenced Items are not available for this document.
The improvements of resonance characteristics of ZnO-based film bulk acoustic-wave resonator (FBAR) devices operating at 2.5 GHz are presented for the first time. Because of thermal annealing processes, the resonance characteristics could be significantly improved. At about 2.5 GHz, excellent resonance characteristics are observed in terms of good return loss and high quality factor.
Published in:
Electronics Letters
(Volume:44
,
Issue:
5
)
Date of Publication: Feb. 28 2008
- Page(s):
- 387 - 388
- ISSN :
- 0013-5194
- INSPEC Accession Number:
- 9943912
- Digital Object Identifier :
- 10.1049/el:20080218
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 05 March 2008
- Issue Date :
- Feb. 28 2008
- Sponsored by :
- Institution of Engineering and Technology
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