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Improvement of Fast and Precise Positioning of Large-Scale High-Precision Step-Stage Based on Vibration Suppression PTC

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4 Author(s)
Sakata, K. ; Yokohama Nat. Univ., Yokohama ; Fujimoto, H. ; Shimoyama, T. ; Saiki, K.

In the positioning system of the large-scale high-precision step-stage, the primary resonance mode appears in low frequency even in the high stiffness stage. The resonance mode is a major obstacle of fast and precise positioning. In this paper, we apply vibration suppression PTC (perfect tracking control) which can control the resonance mode actively on the large- scale stage. Finally, simulations and experiments are performed to show the advantages of the vibration suppression PTC.

Published in:

Industrial Electronics Society, 2007. IECON 2007. 33rd Annual Conference of the IEEE

Date of Conference:

5-8 Nov. 2007