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In this paper, the carbon nanowires grown between the microgap by corona discharge assisted thermal CVD is discussed. The experiments have been done in three different temperatures, 500, 600 and 700degC. At 700degC, because of too high local temperature, the electrodes are damaged and the carbon nanowires grow very densely and extend over the gap between the electrodes. By using this method, it is able to lower the growth temperature which enables to widen the materials used as the electrodes and the applications. This method can be used to fabrication the nanowire sensor.
Microprocesses and Nanotechnology, 2007 Digest of papers
Date of Conference: 5-8 Nov. 2007