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Electrical Characterization of Nano-Floating Gate Capacitor with Silicon Carbide Nano-Particles

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4 Author(s)

We fabricated and characterized the electrical properties of nano-floating gate capacitors with SiC nano-particles embedded in SiO2 layer. We also showed a capability of this structure to application of the nonvolatile memory device.

Published in:

Microprocesses and Nanotechnology, 2007 Digest of papers

Date of Conference:

5-8 Nov. 2007