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Large Fabrication Tolerance for VCSELs Using High-Contrast Grating

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3 Author(s)
Ye Zhou ; California Univ., Berkeley ; Huang, M.C.Y. ; Chang-Hasnain, C.J.

We report the experimental demonstration of a large fabrication tolerance for a single-layer, highly reflective high-index-contrast subwavelength grating (HCG) mirror. HCG vertical-cavity surface-emitting lasers (VCSELs) are demonstrated with plusmn20% variation in the HCG critical dimension. Emission wavelength of the HCG-VCSEL shifts only 2 nm with 40% change in grating spacing and 8% change in grating period.

Published in:

Photonics Technology Letters, IEEE  (Volume:20 ,  Issue: 6 )