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Spatial and Phase-Resolved Optical Emission Patterns in Capacitively Coupled Radio-Frequency Plasmas

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3 Author(s)
Nemschokmichal, S. ; Inst. of Phys., Univ. of Greifswald, Greifswald ; Dittmann, K. ; Meichsner, J.

Phase-resolved optical emission spectroscopy is a powerful tool to investigate the excitation mechanisms within the radio-frequency (RF) cycle of capacitively coupled RF plasmas. In this paper, the optical emission of oxygen, hydrogen, and argon atoms is investigated over a wide range of process parameters. The spatially (axial) and temporally resolved spectroscopy reveals four prominent emission patterns.

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Plasma Science, IEEE Transactions on  (Volume:36 ,  Issue: 4 )