By Topic

Silicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $33
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

8 Author(s)
J. M. Kim ; Seoul Nat. Univ., Seoul ; I. J. Hyeon ; K. Cho ; H. J. Lee
more authors

A novel single crystalline silicon diamond-shaped atomic force microscope (AFM) cantilever for accurate mechanical tests of MEMS structures is presented. A strip bending test of micromachined gold thin film strip specimens has been performed using the proposed AFM cantilever. The experimental results show that a more accurate and uniform bending test is possible with this new cantilever by suppressing lateral motions of a conventional beam-shaped cantilever.

Published in:

Electronics Letters  (Volume:44 ,  Issue: 4 )