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Laser Micro-processing for Industrial Production Applications

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3 Author(s)
Booth, H.J. ; Oerlikon Exitech Ltd, Oxford ; Grunewald, P.H. ; Pedder, J.E.A.

The advantages of laser micro-processing in device manufacture for the solar, displays and microsystems industries have lead to the replacement of conventional manufacturing techniques in production environments. Tool advances and industrial production techniques will be discussed.

Published in:

Lasers and Electro-Optics, 2007. CLEO 2007. Conference on

Date of Conference:

6-11 May 2007