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Soft X-Ray Contact Imaging of Thin Films by a Laser-Plasma Source

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13 Author(s)
Stagira, S. ; Nat. Lab. for Ultrafast & Ultraintense Opt. Sci., Milan ; Calegari, F. ; Benedetti, E. ; Cabanillas, J.
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Quantitative analysis of nanometric films is achieved by soft X-ray imaging using a laser-plasma source and LiF crystals as detectors. Excitation of color center fluorescence in exposed LiF allows image detection with sub-micron resolution.

Published in:

Lasers and Electro-Optics, 2007. CLEO 2007. Conference on

Date of Conference:

6-11 May 2007