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Transparent Thin-Film Characterization by Using Differential Optical Sectioning Interference Microscopy

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3 Author(s)
Chun-Chieh Wang ; Nat. Chung Cheng Univ., Chia-Yi ; Hong-Jhang Jian ; Lee, Chau-Hwang

Differential optical sectioning interference microscopy is proposed for measuring the refractive index (n) and thickness (d) of transparent thin films with sub-micrometer lateral resolution. We demonstrate this technique with a 100-nm SiO2 layer on Si.

Published in:

Lasers and Electro-Optics, 2007. CLEO 2007. Conference on

Date of Conference:

6-11 May 2007

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