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Bandwidth-Tunable Add-Drop Filters Based on MEMS-Actuated Single-Crystalline Silicon Microtoroidal Resonators

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2 Author(s)
Jin Yao ; Dept. Electrical Engineering and Computer Sciences, University of California, Berkeley, California94720, USA. Email: ; Ming C. Wu

A bandwidth-tunable filter has been demonstrated by MEMS-actuated single-crystalline silicon microtoroidal resonator. Bandwidth is tuned from 2.8 to 78.4 GHz by voltage control. A 21.8 dB extinction ratio is attained as a dynamic add-drop filter.

Published in:

2007 Conference on Lasers and Electro-Optics (CLEO)

Date of Conference:

6-11 May 2007