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Demonstration of Silicon Microdisk Resonators Compatible with Active Integration: Ultra-high Q and Efficient Waveguide-Resonator Coupling

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3 Author(s)
Soltani, M. ; Georgia Inst. of Technol., Atlanta ; Yegnanarayanan, S. ; Adibi, A.

Silicon-on-insulator microdisk resonators with efficient planar-integrated input-output coupling are demonstrated. Two structures of fully-etched and partially-etched microdisk-on- substrate, compatible with active integration are fabricated and compared. Experimental quality factors about 2.5 times 106 and critical coupling are observed.

Published in:

Lasers and Electro-Optics, 2007. CLEO 2007. Conference on

Date of Conference:

6-11 May 2007