Demonstration of Silicon Microdisk Resonators Compatible with Active Integration: Ultra-high Q and Efficient Waveguide-Resonator Coupling

Silicon-on-insulator microdisk resonators with efficient planar-integrated input-output coupling are demonstrated. Two structures of fully-etched and partially-etched microdisk-on- substrate, compatible with active integration are fabricated and compared. Experimental quality factors about 2.5 times 10
⁶
and critical coupling are observed.