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Physical Modeling of MEMS Variable Inductor

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3 Author(s)
Tackya Yammouch ; Tokyo Inst. of Technol., Integrated Res. Inst., Yokohama ; Kenichi Okada ; Kazuya Masu

In this study, we propose a new equivalent circuit model of variable inductors. We have proposed variable inductors with metal plate moving with a microelectromechanical system (MEMS) actuator. The proposed model consists of a conventional single-pi model, networks for silicon substrate and metal plate flowing eddy current, and coupling coefficients between these networks. The model is verified by fitting with measured data. Error in inductance and value is less than plusmn5%.

Published in:

IEEE Transactions on Circuits and Systems II: Express Briefs  (Volume:55 ,  Issue: 5 )