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Thin film transistor lateral insulated gate bipolar transistors (TFT-LIGBTs) were fabricated combining the technology of thin film transistor and the power structure used excimer laser anneal in this paper. Excimer laser anneal and substrate heating at 400degC simultaneously for TFT-LIGBT to integrate with the driving circuit of system-on-panel (SOP) and other circuit in the future. The maximum breakdown voltage of step doping TFT-LIGBT after excimer laser annealing is 280 V with Ldrift=35 mum. The ON/OFF current ratio is 1.59times106. It is higher than solid phase crystallization (SPC)-LIGBT 1.74 about 106 times at Vanode=30 V with Ldrift=35 mum and even more than TFT-LDMOS 1.42times105 10 times.
Date of Conference: 20-22 Dec. 2007