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In this paper a charge pump model based on a DOE (design of experiment) model generation technique is presented. The DOE technique takes as input electrical simulation results of a charge pump circuit for different component geometries and different oscillator pulse periods. It produces, as outputs, polynomial equations of the charge pump output voltage HV and the consumption current ISUNK. Using those equations, impact of specific charge pump design parameters on charge pump outputs is clearly shown. Thus, design guidelines can be followed to optimize charge pump circuits efficiency. To validate this approach, this optimization methodology is used to evaluate the charge pump optimal configuration of a low voltage and low current IC circuit (RFID tag).