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The thin films of undoped oxide indium and doped oxide indium by fluorine and tin were prepared by SPRAY pyrolysis. These layers were deposited on glass substrates from the Indium chloride (InCl3), tin chloride (SnCl2;2H2O) and ammonium fluoride (NH4F).The microstructure, morphological, optical transmittance and chemical composition of these layers were studied by the X ray diffraction (XRD), the scanning electron microscopy(SEM), atomic force microscopy (AFM) and microanalysis (EDX) respectively. A study of luminescence by cathodoluminescence technique and a study of nonlinear susceptibility of the third order by the third harmonic generation (THG) technique of these thin films were carried out. The aim of our study is the optimization of luminescence as well as the non-linear response to a possible application in optoelectronics as transparent conductive electrode or in microelectronics fields.