Referenced Items are not available for this document.
This study presents a novel process to batch-fabricated carbon nanotube devices on flexible substrate. In short, the pre-made carbon nanotube (CNT) arrays on Si-wafer are firstly blended with polymer and are then transferred onto a polymer film using chemical-vapor-deposition (CVD) of parylene. This yields CNT arrays on flexible substrates. Electrical measurements reveal that nanotube arrays behave as ohmic conductors and their current-voltage profile is linear. Nanotubes embedded in polymer are then exposed by O2 plasma etching and field emission measurements indicate that exposed nanotube arrays exhibit a low threshold field emission at 0.58 V/mum and field enhancement factor appears to be 5500. Thus, the present devices offer a novel route to flexible FED applcation.
Published in:
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Date of Conference: 13-17 Jan. 2008
- Page(s):
- 697 - 700
- ISSN :
- 1084-6999
- E-ISBN :
- 978-1-4244-1793-3
- Print ISBN:
- 978-1-4244-1792-6
- INSPEC Accession Number:
- 9829596
- Conference Location :
- Tucson, AZ
- Digital Object Identifier :
- 10.1109/MEMSYS.2008.4443752
- Product Type:
- Conference Publications
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