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Crystal orientation dependence of fatigue characteristics in single crystal silicon measured using a rotating micro resonator

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2 Author(s)
T. Ikehara ; National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan ; T. Tsuchiya

This paper reports the effect of crystal orientation on the fatigue fracture characteristics of single crystal silicon (SCS). Two types of micro resonators that have the same shapes were aligned to different directions: lang110rang and lang100rang. As a result, significant fatigue-life difference was observed. The lang100rang oriented test pieces showed almost 104 times longer fatigue life than the lang110rang oriented test pieces against same bending deflection. The difference is discussed through the fracture surface observation and stress analyses including both anisotropic elastic properties and anisotropic fracture strength.

Published in:

Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on

Date of Conference:

13-17 Jan. 2008