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Enhanced toxic gas detection using a MEMS preconcentrator coated with the metal organic framework absorber

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9 Author(s)
J. Yeom ; Department of Mechanical Science and Engineering, University of Illinois, Urbana, USA ; I. Oh ; C. Field ; A. Radadia
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Widespread and timely sensing of explosives, toxic chemicals and industrial compounds needs fast, sensitive detection technology that is affordable and portable. Many gas detectors developed for portable applications are based on sensing a change in resistivity or other non-selective material properties, often leading to low sensitivity and selectivity. In this paper, we report a new generation of the UIUC MEMS gas preconcentrator (muGPC) and its integration into a microfluidic M-8 (muM8) detector to demonstrate an enhanced overall detection limit and selectivity in detecting a toxic gas simulant. The integration creates a portable sensor to sniff an analyte of interest at concentration of 10 ppb or below.

Published in:

Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on

Date of Conference:

13-17 Jan. 2008