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“Membrane micro emboss following excimer laser ablation (MeME-X) process” for pressure-driven micro active catheter

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2 Author(s)
Masashi Ikeuchi ; Dept. of Micro/Nano Systems Engineering, Nagoya University 1 Furo-cho, Chikusa-ku, Nagoya, Aichi, 464-8603, Japan ; Koji Ikuta

We have developed MeME-X process to break-through the conventional miniaturization limit of the pressure-driven micro active catheter by two orders of magnitude. The world's smallest micro active catheter of r~200mum was successfully fabricated using MeME-X process. The catheter was made of thin biocompatible polymer membrane and actuated just by water pressure for safe intravascular surgery.

Published in:

Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on

Date of Conference:

13-17 Jan. 2008