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CMOS based sensors: From a sample to real products

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1 Author(s)
Mayer, F. ; Sensirion Inc., Zurich

Sensirion [1] is a high-tech sensor company with headquarters in Switzerland. Based on technological concepts developed in the mid 90 s at ETH Zurich, Sensirion was founded in 1998. Product development started in the same year. Today, Sensirion is a high-tech sensor company, with a highly skilled team of more than 120 employees. About 50% of the manpower is concentrated in R&D. Sensirion successfully manufactures millions of MEMS sensors each year for a wide range of industrial, consumer, medical, and automotive applications. Sensirion is the industry leader for chip based humidity & temperature sensors, mass flow measurement and control devices for gases and liquids, and differential pressure sensors.

Published in:

Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on

Date of Conference:

13-17 Jan. 2008