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Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range

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9 Author(s)
Verd, J. ; Dept. of Electron. Eng., Univ. Autonoma de Barcelona, Barcelona ; Uranga, A. ; Abadal, G. ; Teva, J.L.
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This letter presents the design, fabrication, and demonstration of a CMOS/microelectromechanical system (MEMS) electrostatically self-excited resonator based on a submicrometer-scale cantilever with ~1 ag/Hz mass sensitivity. The mechanical resonator is the frequency-determining element of an oscillator circuit monolithically integrated and implemented in a commercial 0.35 mum CMOS process. The oscillator is based on a Pierce topology adapted for the MEMS resonator that presents a mechanical resonance frequency of ~6 MHz, a relative low quality factor of 100, and a large motional resistance of ~25 M. The MEMS oscillator has a frequency stability of ~1.6 Hz resulting in a mass resolution of ~1 ag (1 ag = 10-18 g in air conditions.

Published in:

Electron Device Letters, IEEE  (Volume:29 ,  Issue: 2 )