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Active liquid aspiration and dispensing based on an expanding PDMS composite

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3 Author(s)
Samel, B. ; R. Inst. of Technol., Stockholm ; Griss, P. ; Stemme, G.

In this work we present the development of a liquid aspiration and dispensing unit which is based on a single- use thermally expanding PDMS composite. The composite actuator consists of expandable microspheres incorporated into a PDMS matrix and allows for locally altering its topography by means of individually addressable integrated heaters. Devices were designed in order to enable the generation of a cavity by the expansion of the composite actuator and are entirely fabricated from low-cost materials using wafer-level processes only. The fabricated devices successfully demonstrated controlled liquid aspiration and release thereafter of liquid volumes ranging from 180 nl to 815 nl.

Published in:

Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on

Date of Conference:

21-25 Jan. 2007

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