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Semiconductor nanowire manipulation using optoelectronic tweezers

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6 Author(s)

We demonstrate, for the first time, the trapping and manipulation of individual Si nanowires by light-induced dielectrophoresis, or optoelectronic tweezers (OET). Trapping of single Si nanowires, with a diameter of 100 nm and length of 15 mum, is reported using OET with an optical power density of 100 W/cm2 . We show that OET can separate two adjacent Si nanowires and transport a single nanowire at a speed of 135 mum/s. Array patterns of Si nanowires have also been demonstrated.

Published in:

Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on

Date of Conference:

21-25 Jan. 2007