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A novel fabrication method of flexible micro electrode array for neural recording

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4 Author(s)
T. Wang ; Institute of MEMS, National Tsing-Hua University, Taiwan No. 101, Kuang-Fu Rd., Sec. II, Hsinchu 300, R.O.C ; W. Yang ; H. Huang ; C. Fu

We present in this paper a novel fabrication method of making flexible micro electrode array for neural probing. We have successfully produced micro electrode needles array and their corresponding wirings on a flexible polymer membrane through an ingenious variation of UV-LIGA process. This process is suitable for mass production. The first prototype was designed to have sixteen neural probes (4 times 4) with a needle height of 200 mum. Because of the process flexibility, the micro electrodes have the potential to be fabricated on different kinds of polymer membranes, which would be very useful in various targets, especially when "compliance" and "fracture tolerance" are desired. We will introduce our fabrication approach, preparation methods and fabricated results in this paper.

Published in:

Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on

Date of Conference:

21-25 Jan. 2007