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A new fabrication process for micro optical elements using drie and oxidation

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3 Author(s)
Ohara, J. ; Denso Corp., Nisshin ; Kano, K. ; Takeuchi, Y.

We have developed a new fabrication process of micro optical elements by applying DRIE (Deep Reactive Ion Etching) process and thermal oxidation, which enables us to make micro lenses and prisms on a silicon substrate without assembling. This process can also form other optical elements, such as light wave-guides by changing mask pattern.

Published in:

Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on

Date of Conference:

21-25 Jan. 2007