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We propose the optimal design for "internal dielectric transduction" of longitudinal bulk mode resonators. This transduction increases in efficiency as the dielectric thickness approaches half the acoustic wavelength. With dielectric films at positions of maximum strain (minimum displacement) in the resonator, 60 GHz resonators are proposed with 50 Omega motional impedance.
Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on (Volume:54 , Issue: 12 )
Date of Publication: December 2007