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A CMOS Compatible MEMS-based Voltage Multiplier for On-chip Generation of Large DC Voltages

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3 Author(s)
Valizadeh, Pouya ; West Virginia Univ., Morgantown ; Yi Yang ; Famouri, P.

Operation of many electrostatically-activated MEMS devices, such as signal processors and inertia! sensors, is reliant on the on-chip availability of large DC voltage (>50 V). Although, voltage multipliers are suitable structures for achieving high DC voltages, the reduced junction breakdown-voltage of today's CMOS technology and body-effect complications restrict the maximum output voltage of these integrated circuits to voltages lower than the required. In order to circumvent these restrictions, a micro-electromechanical switch architecture is proposed to replace the ordinary MOS-based voltage multipliers. In this paper, required modifications to the conventional voltage multiplier architecture are proposed. A study on the suitable switch configuration is also reported.

Published in:

Optoelectronic and Microelectronic Materials and Devices, 2006 Conference on

Date of Conference:

6-8 Dec. 2006