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One-Shot Exposure for Patterning Two-Dimensional Photonic Crystals to Enhance Light Extraction of InGaN-Based Green LEDs

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7 Author(s)
Mei-Li Hsieh ; Nat. Taiwan Normal Univ., Taipei ; Kuo-Chang Lo ; Lan, Yi-Sheng ; Yang, S.Y.
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To promote the feasibility of using photonic crystals to enhance light extraction of light-emitting diodes (LEDs) for industrial applications, the request for the high-yield and simple exposure process to pattern two-dimensional photonic crystals (2DPCs) becomes rather urgent. In this work, we developed a one-shot three-beam laser interference system to fabricate a 2DPC on an InGaN-based green LED to address its performance for backlight display applications. Using the current exposure system we develop here, a submicro-patterned area of 6 mm in diameter can be achieved. The experimental results show that the operating voltage of a 1 times 1 mm2 in-area LED incorporated with the 2DPC is around 4 V, and the light extraction efficiency is enhanced by a factor of 2.1.

Published in:

Photonics Technology Letters, IEEE  (Volume:20 ,  Issue: 2 )