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The field emission from carbon thin films, nanotubes and nanofibers has received a great deal of attention because of its potential application in flat panel displays and other nanoelectronic devices. Recently, a concept for maskless digital electrostatically focused e-beam array direct- write lithography (DEAL) using a vertically aligned carbon nanofiber (VACNF) array has been developed. This concept incorporates a digitally addressable field emission array (DAFEA) integrated into a logic and control circuit realized in standard bulk CMOS process. In order to simulate and predict the system behavior, a compact circuit model for the VACNF field emission devices is required. This paper presents a compact model for the static and the transient electrical behavior of a VACNF field emitter devices.