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The authors have implemented a robust CNSPACK-based linear equation solver in an in-house TCAD tool. This solver is enhanced with efficient matrix pre-conditioning algorithms to enable accurate handling of a wide scale of floating-point numbers. Sample results are shown for very low temperature radiation response of a 0.12-mum NMOSFET and I-V curves of 0.13-mum SiGe HBT. The solution is very stable. However, the match against corresponding experimental data is not good due to inaccuracy of physical models (ongoing work).