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Coarse and fine motion micro robot with six degrees of freedom

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4 Author(s)
Kusunoki, S. ; Aichi Inst. of Technol., Toyota ; Torii, A. ; Doki, K. ; Ueda, Akiteru

Displacement of a micro robot is described theoretically and experimentally. The structure of the robot is a Stewart-platform using six stacked-type piezoelectric actuators. The robot, which can realize a precise motion, is developed for a flexible conveying system, such as a desktop manufacturing system. The robot is used in a micro/nano system which requires a nanometer resolution. We describe the principle of the motion and demonstrate the self-propelled motion and the precise motion.

Published in:

Micro-NanoMechatronics and Human Science, 2007. MHS '07. International Symposium on

Date of Conference:

11-14 Nov. 2007