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Two-photon microfabrication with a supercritical CO2 drying process toward replication of three-dimensional microstructures

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2 Author(s)
Hasegawa, T. ; Yokohama Nat. Univ., Yokohama ; Maruo, S.

We have fabricated three-dimensional (3D) microstructures using two-photon microfabrication with supercritical rinsing. Since the surface tension while rinsing the microstructures can be removed, sophisticated 3D microstructures such as a cantilever and a lattice were fabricated without deformation during drying process. We also fabricated microstructures including thin partition membrane as a master model for replication of 3D microstructures with closed loops such as a beam and table. Such 3D microtransfer molding will be applied to fabrication of microdevices for biochip technology and nanophotonics.

Published in:

Micro-NanoMechatronics and Human Science, 2007. MHS '07. International Symposium on

Date of Conference:

11-14 Nov. 2007