By Topic

Sensing Temperature in Water using FIB CVD Nano Thermal Sensors

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
ElShimy, H. ; Nagoya Univ., Nagoya ; Nakajima, M. ; Arai, F. ; Fukuda, T.

In this paper we illustrate the fabrication process of nano temperature sensor probe using focused ion beam chemical vapor deposition (FIB-CVD) of tungsten over atomic force microscope (AFM) cantilevers, to be used in sensing temperature distribution in local area. We present the fabrication approach & modifications for making this sensor probe capable of sensing temperature distributions not only in air but in water environment as well. The nano sensor probe was calibrated in water using the hot stage of the environmental scanning electron microscope (ESEM). The experimental results show the positive characteristics of the temperature coefficient of resistance (TCR). We also illustrate the response of the sensor to sudden changes in the surrounding medium. The characteristics of this sensor probe were compared to previously reported temperature sensing devices. The comparison verifies that our sensor is relatively uncomplicated and reliable in fabrication. The capability of sensing temperature in water will allow our sensor to be used in wide range of bio-applications, especially in studying thermogenesis in single cells.

Published in:

Micro-NanoMechatronics and Human Science, 2007. MHS '07. International Symposium on

Date of Conference:

11-14 Nov. 2007