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Trap layer engineered gate-all-around (GAA) silicon nanowire SONOS memory showing excellent device performance is demonstrated for the first time. Nitride and silicon nanocrystal (Si-NC) has have been incorporated as the engineered charge trapping layer. Fast transient memory characteristic is shown owing to the nanowire channel structure. The device with embedded Si-NC achieves even faster higher memory speed and increased window, up to 3.2 V DeltaVth shift for 1 mus and 6.25 V memory window. The nanowire based non-volatile SONOS memory is promising for the future high speed and low power NAND-type flash memory application.
Date of Conference: 10-12 Dec. 2007