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Integration Technology of PC-FUSI (Phase Controlled FUSI) / HfSiON Gate Stack for Embedded Memory Application

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9 Author(s)

Fabrication process of phase controlled FUSI (PC-FUSI)/HfSiON gate structure for small SRAM cells formation is proposed. The critical issue is controlled NiSi/Ni3Si boundary formation between the N-FET and P-FET gate electrode within a narrow STI region with wide process margin. This was realized by adopting a hard mask process to selectively form N/P-FET FUSI under tuned sintering condition. Suitable Vth for LSTP devices, +/-0.45 V, and good transistor performance, Ion=550/310 muA/mum at Ioff=20 pA/mum, were obtained with Lg=55 nm. Operation of 0.446 mum2 SRAM cells was confirmed even at 0.8 V with a static noise margin of 181 mV. We also discuss suitability of a PC-FUSI/HfSiON gate for embedded DRAM cell transistors.

Published in:

Electron Devices Meeting, 2007. IEDM 2007. IEEE International

Date of Conference:

10-12 Dec. 2007