By Topic

Light-Intensity-Feedback-Waveform Generator Based on MEMS Variable Optical Attenuator

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Borovic, B. ; Invensense Inc., Sunnyvale ; Ai-Qun Liu ; Popa, D. ; Hong Cai
more authors

Increasing demands on the dynamical behavior of microelectromechanical systems (MEMS) devices are reaching a point where mechanical design by itself cannot provide further improvements. Alternative approaches based on control theory, such as the open-loop or the closed-loop driving strategies, must be used instead to provide further enhancements in device performance. In this paper, the design of a light-intensity control system for an optical waveform generator is presented. The optical waveform generator is based on the light-modulation ability of MEMS variable optical attenuators (VOA). The VOA is of shutter-insertion type driven by an electrostatic comb drive. The control system consists of an inner position-control loop and an outer light-intensity-control loop. The inner control loop improves the dynamic response of the position of the MEMS electrostatic comb actuator by using position feedback, whereas the outer feedback loop handles both light-intensity regulation and tracking. An experimental setup and a practical system characterization are given. Based on this, the feedback control system is implemented on an actual MEMS VOA. The results verify that the control system proposed in this paper does significantly improve both the accuracy and the dynamical behavior of the existing device.

Published in:

Industrial Electronics, IEEE Transactions on  (Volume:55 ,  Issue: 1 )