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P1I-4 Simulation of BAW Resonators Frequency Adjustment

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3 Author(s)
Reinhard, A. ; CEA-Leti Minatec, Grenoble ; Buffet, N. ; Shirakawa, A.

A theoretical approach of the frequency trimming of BAW filters is presented. We discuss the way to integrate this step already in the design stage by considering the frequency adjustment of worst cases. In particular, we show that the frequency trimming puts some requirements on the acoustical design of resonators. We also discuss the limits of this adjustment, and evaluate on an example the minimum dispersion that cannot be suppressed.

Published in:

Ultrasonics Symposium, 2007. IEEE

Date of Conference:

28-31 Oct. 2007