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11E-4 Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators

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7 Author(s)
Jansman, A.B.M. ; NXP Semicond. Res. Eindhoven, Eindhoven ; Strijbos, R.C. ; Lobeek, J.W. ; Vanhelmont, F.W.M.
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For a three-dimensional description of rectangular BAW resonators, a simple vibrating membrane model is revisited. Displacement profiles from this model are compared to measured profiles. Furthermore, a method for extraction of dispersion characteristics from electrical measurements is proposed and verified against interferometry measurements.

Published in:

Ultrasonics Symposium, 2007. IEEE

Date of Conference:

28-31 Oct. 2007