By Topic

Development of a micromanipulation mystem with force sensing

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Khan, S. ; Sabanci Univ., Istanbul ; Nergiz, A.O. ; Sabanovic, A. ; Patoglu, V.

This article provides in-depth knowledge about our undergoing effort to develop an open architecture micromanipulation system with force sensing capabilities. The major requirement to perform any micromanipulation task effectively is to ensure the controlled motion of actuators within nanometer accuracy with low overshoot even under the influence of disturbances. Moreover, to achieve high dexterity in manipulation, control of the interaction forces is required. In micromanipulation, control of interaction forces necessitates force sensing in milli-Newton range with nano-Newton resolution . In this paper, we present a position controller based on a discrete time sliding mode control architecture along with a disturbance observer. Experimental verifications for this controller are demonstrated for 100, 50 and 10 nanometer step inputs applied to PZT stages. Our results indicate that position tracking accuracies up to 10 nanometers, without any overshoot and low steady state error are achievable. Furthermore, the paper includes experimental verification of force sensing within nano-Newton resolution using a piezoresistive cantilever end- effector. Experimental results are compared to the theoretical estimates of the change in attractive forces as a function of decreasing distance and of the pull off force between a silicon tip and a glass surface, respectively. Good agreement among the experimental data and the theoretical estimates has been demonstrated.

Published in:

Intelligent Robots and Systems, 2007. IROS 2007. IEEE/RSJ International Conference on

Date of Conference:

Oct. 29 2007-Nov. 2 2007