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Electrical and electromechanical characterization of piezoelectric thin films in view of MEMS application

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3 Author(s)
Tiedke, S. ; aixACCT Syst. GmbH, Aachen ; Prume, K. ; Schmitz-Kempen, T.

The electrical and electromechanical properties of piezoelectric thin films were measured using different measurement procedures including a new method which combines the measurement of both the effective longitudinal and transverse piezoelectric coefficients on the same sample under precisely defined homogeneous mechanical strain utilizing a 4-point bending setup. Stress and corresponding strain distributions in the film were verified by finite element simulations.

Published in:

Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on

Date of Conference:

27-31 May 2007