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Characterization of structural effects in ferroelectric tunable capacitors using barium strontium titanate thin films

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5 Author(s)

We fabricated two types of ferroelectric tunable capacitors, which were metal-insulator-metal structure (MIM) and interdigital electrodes structure (IDE) using (Ba0.7Sr0.3)TiO3 (BST) thin films prepared by chemical solution decomposition (CSD) method. These films showed grained structure and crystalline properties were randomly oriented. Dielectric tunabilty of MIM structures was -52%/6V and that of IDE structures was -50%/15 V, at 2GHz respectively. Quality factor of IDE structures was higher than that of MIM structures.

Published in:

Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on

Date of Conference:

27-31 May 2007