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Fabrication of doped SrZrO3 thin films by Liquid Delivery MOCVD

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4 Author(s)
Kawamura, H. ; Nara Inst. of Sci. & Technol., Ikoma ; Ohkita, S. ; Uchiyama, K. ; Shiosaki, T.

The thin film deposition of proton conductive SrZrO3 (SZO) was demonstrated by liquid delivery Metal-Organic Chemical Vapor Deposition (MOCVD). The deposition conditions, especially oxygen flow, affected a film quality of the SZO thin films as well as deposition temperatures. We consider the materials engineering of impurity doping using this deposition technique will improve the proton conductivity of the SZO films for future fuel cell applications.

Published in:

Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on

Date of Conference:

27-31 May 2007