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Misted Deposition of [3D] Trenches for Drams and Frams III. PZT Thin Films and PZT Nanotubes

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7 Author(s)
Miyake, M. ; Univ. of Cambridge Cambridge CB2 3EQ, Cambridge ; Scott, J.F. ; Lou, X.-J. ; Morrison, F.D.
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Pb(Zr,Ti)O3 (PZT) thin films and nanotube were prepared on SiO2/Si substrates by liquid source misted chemical deposition (LSMCD) using Samco MD-6060 apparatus. We report the deposition and characterization of transparent ferroelectric thin films and nanotubes. PZT thin films deposited at ambient conditions and annealing at 700degC exhibit good ferroelectric properties with remanent polarisation of ca. 15 muC/cm2. The step coverage was 59% on the side wall and 79% on the bottom wall.

Published in:

Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on

Date of Conference:

27-31 May 2007

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